Electron Probe Microanalysis (EPMA)

نویسنده

  • John J. Donovan
چکیده

An electron microprobe is an electron microscope designed for the non-destructive x-ray microanalysis and imaging of solid materials. It is essentially a hybrid instrument combining the capabilities of both the scanning electron microscope (SEM) and an x-ray fluorescence spectrometer (XRF), with the added features of fine-spot focusing (~ 1 micrometer), optical microscope imaging, and precision-automated sample positioning. The analyst makes measurements while observing the sample (with the optical microscope or with a secondary/backscattered electron image) and selecting specific analysis locations (using the precision sample stage).

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تاریخ انتشار 1998